Working Temp.: up to 1,500℃
Working Pressure: 1 ` 760 torr
Precursor Delivery System : Gas, Liquid, Solid
Double-wall water cooled S.S. vacuum chamber
Working Temp.: 2300℃
Vacuum: 5×10-2 Torr
Working Gas.: Ar/N2 (upon request)
Bi-Direction(Upper, Bottom) Press
Servo-hydraulic force control
Car & Bottom Loading type furnace design
Temperature up to 1650℃
Modular construction for ease of installation
Multiple temperature control zone
Excellent uniformity throughout work chamber
Graphite HOT Zone
Temperature up to 2,200℃
Circular type Heating Configuration
Bottom or Front Door Open Type
Vacuum Levels up to 10-3 torr level
Hydrogen concentration (partial pressure)
Vacuum exhaust speed adjustment for
powder heat treatment
automatic operation
Data storage for quality control
SINTERING or BRAZING
¢800 × 1200L, 2,000℃
¢800 × 1200L, 2,000℃
Hot Zone Material : W, MO, STS